A Guide to Hands-on MEMS Design and Prototyping

Language: English

Published by Cambridge University Press, GB, 2011

1107645794 / 9781107645790

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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

Seller Inventory # LU-9781107645790

Title
A Guide to Hands-on MEMS Design and Prototyping
Author
Joel A. Kubby
Publisher
Cambridge University Press, GB
Publication year
2011
Condition
New
Binding
Paperback
Language
English
ISBN 10
1107645794
ISBN 13
9781107645790
Item weight
320 grams

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