A Guide to Hands-on MEMS Design and Prototyping

Language: English

Published by Cambridge University Press, 2011

1107645794 / 9781107645790

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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

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Title
A Guide to Hands-on MEMS Design and Prototyping
Author
Joel A. Kubby
Publisher
Cambridge University Press
Publication year
2011
Condition
New
Binding
Paperback
Language
English
ISBN 10
1107645794
ISBN 13
9781107645790

Bill & Ben Books

Faringdon, United Kingdom

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AbeBooks seller since March 3, 2025

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