Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

Madou, Marc J.

ISBN 10: 0849308267 / ISBN 13: 9780849308260

Published by CRC Pr I Llc, 2002

About this Item

2nd sub edition. 608 pages. 11.00x8.75x2.00 inches. In Stock.

Seller Inventory # 0849308267

Bibliographic Details

• Title: Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
• Publisher: CRC Pr I Llc
• Publication Date: 2002
• Language: English
• ISBN 10: 0849308267
• ISBN 13: 9780849308260
• Binding: Hardcover
• Edition: 2nd Edition
• Condition: Brand New
• Weight: 2.02 kilograms

About this title

Synopsis

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

Revised chapters that reflect the many recent advances in the field

Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology

In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.

Many more links to the Web

Problem sets in each chapter

Review

"The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication." -Diane Kauzlarick, EET