This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In fair condition, suitable as a study copy. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,2100grams, ISBN:9780849308260.

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Bibliographic Details

Title

Fundamentals of Microfabrication: The Science of Miniaturization

Publisher

CRC Press

Publication Date

2002

Language

English

ISBN 10

0849308267

ISBN 13

9780849308260

Binding

Hardcover

Edition

2nd Edition

Condition

Fair

Weight

2100 grams

Seller catalogs

Biology

About this title

Synopsis

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

Revised chapters that reflect the many recent advances in the field

Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology

In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.

Many more links to the Web

Problem sets in each chapter

Review

"The Fundamentals of Microfabrication describes the science of miniaturization, which demonstrates ways of making devices using smaller and smaller materials. This book brings an understanding of manufacturing options, material choices, and size...This book is well written and very informative for anyone interested in this area of engineering and could be used in an advanced course for the study of microfabrication." -Diane Kauzlarick, EET

"About this title" may belong to another edition of this title.

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