Fundamentals of Microelectronics Processing (MCGRAW HILL CHEMICAL ENGINEERING SERIES)

Lee, Hong H.

ISBN 10: 0070370567 / ISBN 13: 9780070370562

Published by McGraw-Hill College, 1989

About this Item

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Bibliographic Details

Title: Fundamentals of Microelectronics Processing ...

Publisher: McGraw-Hill College

Publication Date: 1989

Binding: hardcover

Condition: Good

About this title

Synopsis:

This new text introduces the material of each process type by explaining the underlying chemical engineering (and physical) principles. For microelectronic processing courses the text progresses from an overview of microelectronics processing through a logically-sequenced discussion of the processes leading to integrated circuits. The author is very careful to define terms that may be unfamiliar to chemical engineers, to provide numerous examples to aid in their understanding, and to include ample end-of-chapter problems.