Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)
Language: English
Published by Springer Science & Business Media, 2004
- Hardcover
- New
Seller: Fox and Tome Booksellers, Frederick, MD, U.S.A.Fox and Tome Booksellers
AbeBooks seller since March 2, 2023
Condition: New
£ 73.62
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This hardcover volume by Loucas G. Christophorou and James K. Olthoff examines the physics of low-energy electron collisions with gas-phase molecules, with particular attention to species relevant to plasma-based semiconductor manufacturing. Published by Springer in 2003 as part of the Physics of Atoms and Molecules series, it surveys elastic scattering, excitation, ionization, attachment, and dissociation processes, drawing together cross-section data and rate coefficients for a range of plasma processing gases. The work serves as a reference for researchers in atomic and molecular physics, plasma chemistry, and microelectronics fabrication.
Seller Inventory # SP-000000-shelf-36-1211
- Title
- Fundamental Electron Interactions with Plasma Processing Gases (Physics of Atoms and Molecules)
- Author
- Loucas G. Christophorou; James K. Olthoff
- Publisher
- Springer Science & Business Media
- Publication year
- 2004
- Condition
- New
- Binding
- Hardback
- Language
- English
- ISBN 10
- 0306480379
- ISBN 13
- 9780306480379
- Item weight
- 4.7 pounds
- Dimensions
- 14.0 x 14.0 x 4.0 inches
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Fox and Tome Booksellers
Frederick, MD, U.S.A.
AbeBooks seller since March 2, 2023
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Fox and Tome Booksellers
MD, U.S.A.
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