Flux Profile Modeling using Monte Carlo Simulation

Ramprasad Vijayagopal

ISBN 10: 3838369386 / ISBN 13: 9783838369389

Published by LAP LAMBERT Academic Publishing Jun 2010, 2010

About this Item

Neuware -Molecular Beam Epitaxy (MBE) is a process by which semiconductor films are grown on the substrate by physical vapor deposition of the source material in an ultra high vacuum environment. Spatial variations in flux are a result of the shape of the crucible and the geometry of the growth chamber. A process simulation tool for MBE based on a phenomenological model is proposed and elaborated. The tool can be used in industry to simulate the effusion and deposition of molecular beams by taking into account different parameters that influence the process. Additionally, it can generate deposition profiles created by effusing flux species, on the platen containing the wafers.Books on Demand GmbH, Überseering 33, 22297 Hamburg 104 pp. Englisch.

Seller Inventory # 9783838369389

Bibliographic Details

• Title: Flux Profile Modeling using Monte Carlo Simulation
• Publisher: LAP LAMBERT Academic Publishing Jun 2010
• Publication Date: 2010
• Language: English
• ISBN 10: 3838369386
• ISBN 13: 9783838369389
• Binding: Taschenbuch
• Condition: Neu
• Dimensions: 220W x 150H x 7D millimeters 220 millimeters width by 150 millimeters height by 7 millimeters depth
• Weight: 173 grams

About this title

Synopsis

Molecular Beam Epitaxy (MBE) is a process by which semiconductor films are grown on the substrate by physical vapor deposition of the source material in an ultra high vacuum environment. Spatial variations in flux are a result of the shape of the crucible and the geometry of the growth chamber. A process simulation tool for MBE based on a phenomenological model is proposed and elaborated. The tool can be used in industry to simulate the effusion and deposition of molecular beams by taking into account different parameters that influence the process. Additionally, it can generate deposition profiles created by effusing flux species, on the platen containing the wafers.