Fabrication and Design of Resonant Microdevices

Behraad Bahreyni

ISBN 10: 0815515774 / ISBN 13: 9780815515777

Published by Elsevier Science Sep 2008, 2008

About this Item

This item is printed on demand - it takes 3-4 days longer - Neuware -This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. 250 pp. Englisch.

Seller Inventory # 9780815515777

Bibliographic Details

• Title: Fabrication and Design of Resonant Microdevices
• Publisher: Elsevier Science Sep 2008
• Publication Date: 2008
• Language: English
• ISBN 10: 0815515774
• ISBN 13: 9780815515777
• Binding: Buch
• Condition: Neu
• Dimensions: 262W x 182H x 19D millimeters 262 millimeters width by 182 millimeters height by 19 millimeters depth
• Weight: 571 grams

About this title

Synopsis

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated.

Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters.

* Offers numerous academic and industrial examples of resonant MEMS
* Provides an analytic model of device behavior
* Explains two-port systems in detail
* Devotes ample space to excitation and signal detection methods
* Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Review

This book explains the main issues of fabrication, design, and applications of micromachined resonant devices, and commonly used techniques for processing the output signal of resonant micro-electro-mechanical systems (MEMS)