Electron-Beam Interactions with Solids: Application of the Monte Carlo Method to Electron Scattering Problems (Springer Tracts in Modern Physics)

Dapor, Maurizio

ISBN 10: 3642056237 / ISBN 13: 9783642056239

Published by Springer, 2010

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Bibliographic Details

• Title: Electron-Beam Interactions with Solids: Application of the Monte Carlo Method to Electron Scattering Problems (Springer Tracts in Modern Physics)
• Publisher: Springer
• Publication Date: 2010
• Language: English
• ISBN 10: 3642056237
• ISBN 13: 9783642056239
• Binding: Soft cover
• Condition: New

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Synopsis

This book summarizes the current knowledge on the interaction between fast electrons and solid targets. It gives basic information important for the various analytical and process-oriented electron beam techniques.

From the Back Cover

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.