Doping Engineering for Front-End Processing: Volume 1070 (Paperback)
Language: English
Published by Cambridge University Press, Cambridge, 2014
- Softcover
- New
Seller: CitiRetail, Stevenage, United KingdomCitiRetail
AbeBooks seller since June 29, 2022
Condition: New
£ 35.99
Quantity: 1 available
Add to basketItem description from seller
Paperback. Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed. This item is printed on demand. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability.…
Seller Inventory # 9781107408548
- Title
- Doping Engineering for Front-End Processing: Volume 1070 (Paperback)
- Author
- B.J. Pawlak
- Publisher
- Cambridge University Press, Cambridge
- Publication year
- 2014
- Condition
- new
- Binding
- Paperback
- Language
- English
- ISBN 10
- 1107408547
- ISBN 13
- 9781107408548
"Synopsis" may belong to another edition of this title.
CitiRetail
Stevenage, United Kingdom
AbeBooks seller since June 29, 2022
Shipping rates from United Kingdom to U.S.A.
| Item | 7 to 14 business days | 7 to 60 business days |
|---|---|---|
| First item | £ 37.00 | £ 37.00 |
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