Design for Manufacturability with Advanced Lithography
Language: English
Published by Palgrave Macmillan, 2015
- Hardcover
- Used
Condition: Used - Fine
£ 37.36
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Zustand: Sehr gut | Sprache: Englisch | Produktart: Bücher | This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.
Seller Inventory # 25719082/12
- Title
- Design for Manufacturability with Advanced Lithography
- Author
- Pan, David Z.
- Publisher
- Palgrave Macmillan
- Publication year
- 2015
- Condition
- Sehr gut
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 3319203843
- ISBN 13
- 9783319203843
- Seller catalogs
- Bücher
"Synopsis" may belong to another edition of this title.
From the Back Cover
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level, or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.
- Enables readers to tackle the challenge of layout decompositions for different patterning techniques;
- Presents a coherent framework, including standard cell compliance and detailed placement, to enable Triple Patterning Lithography (TPL) friendly design;
- Includes coverage of the design for manufacturability with E-Beam lithography.
"About the title" may belong to another edition of this title.
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