Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606
Language: English
Published by Cambridge University Press, GB, 2014
- Softcover
- New
Seller: Rarewaves.com UK, London, United KingdomRarewaves.com UK
AbeBooks seller since June 11, 2025
Condition: New
£ 34.67
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Add to basketItem description from seller
This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics.…
Seller Inventory # LU-9781107413207
- Title
- Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606
- Author
- Anthony C. Jones
- Publisher
- Cambridge University Press, GB
- Publication year
- 2014
- Condition
- New
- Binding
- Paperback
- Language
- English
- ISBN 10
- 1107413206
- ISBN 13
- 9781107413207
- Item weight
- 440 grams
"Synopsis" may belong to another edition of this title.
Rarewaves.com UK
London, United Kingdom
AbeBooks seller since June 11, 2025
Shipping rates from United Kingdom to U.S.A.
| Item | 60 to 60 business days | 60 to 60 business days |
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