Characterization of Stress in GaN-on-Sapphire Microelectromechanical Systems Structures Using Micro-Raman Spectroscopy

Language: English

Published by BIBLIOSCHOLAR, 2012

1288368518 / 9781288368518

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Seller: moluna, Greven, Germanymoluna

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KlappentextrnrnMicro-Raman ( Raman) spectroscopy is an e cient, non-destructive techniquewidely used to determine the quality of semiconductor materials and microelectrome-chanical systems. This work characterizes the stress distribution in wurt.

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Title
Characterization of Stress in GaN-on-Sapphire Microelectromechanical Systems Structures Using Micro-Raman Spectroscopy
Author
Parada, Francisco E.
Publisher
BIBLIOSCHOLAR
Publication year
2012
Condition
New
Binding
Soft cover
Language
English
ISBN 10
1288368518
ISBN 13
9781288368518

moluna

Greven, Germany

5-star seller

AbeBooks seller since July 9, 2020

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