CHEMICAL ASPECTS OF ELECTRONIC CERAMICS PROCESSING

PRASHANT N. KUMTA, CARNEGIE MELLON UNIVERSITY, PENNSYLVANIAALOYSIUS F. HEPP, NASA LEWIS RESEARCH CENTRE, CLEVELAND, OHIODAVID B. BEACH, OAK RIDGE NATIONAL LABORATORY, OAK RIDGE, TENNESSEEBARRY ARKLES, GELEST, INC., TULLYTOWN, PENNSYLVANIAJOHN J. SULLIVAN, MKS INSTRUMENTS, INC., ANDOVER, MASSACHUSETTS

ISBN 10: 1558994009 / ISBN 13: 9781558994003

Published by Cambridge University Press, 1998

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Bibliographic Details

• Title: CHEMICAL ASPECTS OF ELECTRONIC CERAMICS PROCESSING
• Publisher: Cambridge University Press
• Publication Date: 1998
• Language: English
• ISBN 10: 1558994009
• ISBN 13: 9781558994003
• Binding: Hardcover
• Condition: Brand New

About this title

Synopsis

The use of high-performance ceramic materials in electronics holds the potential for the development of a wide array of novel, high-value products. These include: ferroelectric ceramic capacitors for ferroelectric nonvolatile random access memory (FRAM); high-dielectric capacitors for dynamic random access memory (DRAM); low-dielectric aerogels and mesoporous materials; electro-optical materials for waveguides, filters and switches; electronic packaging and interconnects for microelectronics; and wide-bandgap materials for blue LEDs and high-temperature devices. The key to the application of any of these materials is the method of deposition (thin films) or fabrication (bulk). Chemical vapor deposition (CVD) continues to be an area of research together with new and improved precursors, delivery systems for low-vapor pressure precursors and improved processing and materials properties. Solution processing of films is also a central theme. Topics include: chemical vapor deposition of oxide ceramics; chemical vapor deposition of nonoxide ceramics; solution routes to ceramic materials; characterization and application of ceramic materials and novel processing of ceramic materials -process characterization.

Book Description

The use of high-performance ceramic materials in electronics holds the potential for the development of a wide array of novel, high-value products. Topics in this volume include: chemical vapor deposition of oxide ceramics; chemical vapor deposition of nonoxide ceramics; and solution routes to ceramic materials.