Atomic Layer Processing
Language: English
Published by Wiley-VCH, 2021
- Softcover
- New
Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, GermanyBuchWeltWeit Ludwig Meier e.K.
AbeBooks seller since January 11, 2012
Condition: New
£ 124.12
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Add to basketItem description from seller
Neuware -This practical guide, written by an author actively involved in corporate R&D, provides in-depth information on etching technologies that are used in the semiconductor industry, helping engineers to select the right technologies for their task and to design etching processes. 284 pp. Englisch.
Seller Inventory # 9783527346684
- Title
- Atomic Layer Processing
- Author
- Thorsten Lill
- Publisher
- Wiley-VCH
- Publication year
- 2021
- Condition
- Neu
- Binding
- Taschenbuch
- Language
- English
- ISBN 10
- 3527346686
- ISBN 13
- 9783527346684
- Item weight
- 584 grams
- Dimensions
- 245x171x17 mm
Learn about fundamental and advanced topics in etching with this practical guide
Atomic Layer Processing: Semiconductor Dry Etching Technology delivers a hands-on, one-stop resource for understanding etching technologies and their applications. The distinguished scientist, executive, and author offers readers in-depth information on the various etching technologies used in the semiconductor industry, including thermal, isotropic atomic layer, radical, ion-assisted, and reactive ion etching.
The book begins with a brief history of etching technology and the role it has played in the information technology revolution, along with a collection of commonly used terminology in the industry. It then moves on to discuss a variety of different etching techniques, before concluding with discussions of the fundamentals of etching reactor design and newly emerging topics in the field such as the role played by artificial intelligence in the technology.
Atomic Layer Processing includes a wide variety of other topics as well, all of which contribute to the author's goal of providing the reader with an atomic-level understanding of dry etching technology sufficient to develop specific solutions for existing and emerging semiconductor technologies. Readers will benefit from:
- A complete discussion of the fundamentals of how to remove atoms from various surfaces
- An examination of emerging etching technologies, including laser and electron beam assisted etching
- A treatment of process control in etching technology and the role played by artificial intelligence
- Analyses of a wide variety of etching methods, including thermal or vapor etching, isotropic atomic layer etching, radical etching, directional atomic layer etching, and more
Perfect for materials scientists, semiconductor physicists, and surface chemists, Atomic Layer Processing will also earn a place in the libraries of engineering scientists in industry and academia, as well as anyone involved with the manufacture of semiconductor technology. The author's close involvement with corporate research & development and academic research allows the book to offer a uniquely multifaceted approach to the subject.
"Synopsis" may belong to another edition of this title.
About the Author
Thorsten Lill, PhD, is Vice President of Emerging Etch Technologies and Systems at Lam Research. He received his doctorate in Physics from the Albert Ludwigs University in Freiburg, Germany and researched as a post doc at the Argonne National Laboratory. He has published 88 articles in the field and holds 89 patents.
"About the title" may belong to another edition of this title.
BuchWeltWeit Ludwig Meier e.K.
Bergisch Gladbach, Germany
AbeBooks seller since January 11, 2012
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