Analysis and Design Principles of MEMS Devices

Language: English

Published by Elsevier Science and Technology, GB, 2005

0444516166 / 9780444516169

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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.

Seller Inventory # LU-9780444516169

Title
Analysis and Design Principles of MEMS Devices
Author
Minhang Bao
Publisher
Elsevier Science and Technology, GB
Publication year
2005
Condition
New
Binding
Hardback
Language
English
ISBN 10
0444516166
ISBN 13
9780444516169
Item weight
760 grams

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