Ulsi Front-End Technology: Covering From The First Semiconductor Paper To Cmos Finfet Technology - Hardcover

Wai Shnig Lau

 
9789813222151: Ulsi Front-End Technology: Covering From The First Semiconductor Paper To Cmos Finfet Technology

Synopsis

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.

"synopsis" may belong to another edition of this title.