Topics in Growth and Device Processing of III-V Semiconductors (International Series on Advances in Solid State Electronics and Technology): 0 - Hardcover

Pearton, S J; Abernathy, C R; Ren, F

Hardcover

ISBN 10: 9810218842 ISBN 13: 9789810218843

Publisher: World Scientific Publishing Co Pte Ltd, 1994

Synopsis

This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.

Edition details

• Publisher: World Scientific Publishing Co Pte Ltd
• Publication date: 1994
• Language: English
• ISBN 10: 9810218842
• ISBN 13: 9789810218843
• Binding: Hardcover
• Number of pages: 560