Introduction To Physics And Technology Of Thin Films, An - Hardcover

Wang, Yuming; Wagendristel, Alfred

Hardcover

ISBN 10: 9810216165 ISBN 13: 9789810216160

Publisher: World Scientific Publishing Co Pte Ltd, 1994

Synopsis

Based on lecture notes that have been used successfully by the authors for the past 10 years, with revisions made each year, this book is aimed at graduate students as well as professionals and researchers involved in thin film physics and technology. It is concise, comprehensive and well organized. The first part of the book introduces the concept, describes the various deposition procedures and illustrates PVD methods, evaporation and sputtering. The basic physical processes of film formation are then analyzed and formulated, including methods for monitoring and measuring film thickness. This book also shows how the subject matter connects with, relates and applies to other fields. In the second part of the book, 3 special topics ― ferromagnetic films, diffusion in thin films and mechanical properties of thin films ― are discussed.Given its wide scope, this book is relevant not just to those involved in materials science but also to engineers as well.

About this title

Synopsis

Based on lecture notes that have been used by the authors for the past ten years, with revisions made each year, this book is aimed at graduate students as well as professionals and researchers involved in thin-film physics and technology. The first part of the book introduces the concept, describes the various deposition procedures and illustrates PVD methods, evaporation and sputtering. The basic physical processes of film formation are then analyzed and formulated, including methods for monitoring and measuring film thickness. This book also shows how the subject matter connects with, relates and applies to other fields. In the second part of the book, three special topics - ferromagnetic films, diffusion in thin films and mechanical properties of thin films - are discussed. Given its wide scope, this book should be relevant not just to those involved in materials science but also to engineers.

Edition details

• Publisher: World Scientific Publishing Co Pte Ltd
• Publication date: 1994
• Language: English
• ISBN 10: 9810216165
• ISBN 13: 9789810216160
• Binding: Hardcover
• Number of pages: 160