MEMS Silicon Oscillating Accelerometers and Readout Circuits - Softcover

Softcover

ISBN 10: 877022966X ISBN 13: 9788770229661

Publisher: River Publishers, 2023

Synopsis

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

About this title

About the Author

Yong Ping Xu

Edition details

• Publisher: River Publishers
• Publication date: 2023
• Language: English
• ISBN 10: 877022966X
• ISBN 13: 9788770229661
• Binding: Paperback
• Edition number: 1
• Number of pages: 312
• Editor: Xu Yong Ping