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Integrated circuit manufacturing technology. principle and technology (second edition)(Chinese Edition)
ISBN 10: 7121282771
ISBN 13: 9787121282775
New
paperback
Seller: liu xing, Nanjing, JS, China
Seller rating 5 out of 5 stars
paperback. Condition: New. Paperback. Pub Date: 2016-04-01 Pages: 368 Language: Chinese Publisher: electronic industry press The book is divided into five units. the first unit. mainly introduces the monocrystalline silicon substrate structure characteristics of silicon and epitaxial wafer manufacturing method;Unit 2 ~ 5 units. this paper mainly introduces basic single silicon chip manufacturing process (oxidation. doping. membrane preparation. light. Seller Inventory # DO043519