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Preparation and characterization of low-k material for microelectronics:: Possible development of mechanical characterization at submicrometric scales with laser ultrasonics technique - Softcover
Synopsis
On the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France).
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Preparation and characterization of low-k material for microelectronics:
Published by
LAP LAMBERT Academic Publishing Okt 2021, 2021
ISBN 10: 6204208489
ISBN 13: 9786204208480
New
Taschenbuch
Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -On the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France). 84 pp. Englisch. Seller Inventory # 9786204208480
Seller Image
Preparation and characterization of low-k material for microelectronics:
Published by
LAP LAMBERT Academic Publishing Okt 2021, 2021
ISBN 10: 6204208489
ISBN 13: 9786204208480
New
Taschenbuch
Seller: buchversandmimpf2000, Emtmannsberg, BAYE, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -On the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France).VDM Verlag, Dudweiler Landstraße 99, 66123 Saarbrücken 84 pp. Englisch. Seller Inventory # 9786204208480
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Preparation and characterization of low-k material for microelectronics: : Possible development of mechanical characterization at submicrometric scales with laser ultrasonics technique
Published by
LAP LAMBERT Academic Publishing, 2021
ISBN 10: 6204208489
ISBN 13: 9786204208480
New
Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - On the morning of my professional career, as research and development engineer, I had the chance to work at the Institute of Micro Electronic Center (IMEC). This book presents the work I have done from February till September 2007 and its focuses on the investigation of mechanical properties of low-k materials using opto-acoustic technique. Before approaching the opto-acoustic method itself, I practiced the techniques of thin films deposition, plasma treatment and spectro-ellipsometric characterization of materials. Unlike spectro-ellipsometric thin films study, the opto-acoustic characterization requires working with samples which include a transducer material. So, at first, we have designed some samples geometries to be analyzed. The goal of this comparative study (mechanic and acoustic) is not only to establish a correlation between nanoindentation and acoustic wave techniques, but also to determine the factors which best describe mechanical properties of low-k materials. The work has been done in collaboration with the Laboratory of Condensed Matter Physics (LPEC), located in Le Mans (France). Seller Inventory # 9786204208480
Seller Image
Preparation and characterization of low-k material for microelectronics: | Possible development of mechanical characterization at submicrometric scales with laser ultrasonics technique
Published by
LAP LAMBERT Academic Publishing, 2021
ISBN 10: 6204208489
ISBN 13: 9786204208480
New
Taschenbuch
Seller: preigu, Osnabrück, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. Preparation and characterization of low-k material for microelectronics: | Possible development of mechanical characterization at submicrometric scales with laser ultrasonics technique | Merlin Nsenkoue | Taschenbuch | Englisch | 2021 | LAP LAMBERT Academic Publishing | EAN 9786204208480 | Verantwortliche Person für die EU: preigu GmbH & Co. KG, Lengericher Landstr. 19, 49078 Osnabrück, mail[at]preigu[dot]de | Anbieter: preigu. Seller Inventory # 120723116