Items related to Preconditioning Dense Complex Linear Systems from a...
Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell's equations using the volume integral method (VIM) - Softcover
Synopsis
Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method.
"synopsis" may belong to another edition of this title.
About the Author
He is a lecturer at Haramaya University. He received his B.Sc. degree in Mathematics with distinction from Dilla University. He studied his 1st M.Sc. degree in Mathematics at Norwegian University of Science and Technology (Norway) and his 2nd M.Sc. degree in Industrial and Applied Mathematics at Eindhoven University of Technology (The Netherlands).
"About this title" may belong to another edition of this title.
Buy New
View this item
£ 44.07
£ 9.60 shipping from Germany to United Kingdom
Destination, rates & speedsSearch results for Preconditioning Dense Complex Linear Systems from a...
Seller Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization
Published by
LAP LAMBERT Academic Publishing Okt 2011, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Taschenbuch
Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. 104 pp. Englisch. Seller Inventory # 9783846510124
Quantity: 2 available
Seller Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization : Discretizing Maxwell's equations using the volume integral method (VIM)
Published by
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Taschenbuch
Seller: AHA-BUCH GmbH, Einbeck, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method. Seller Inventory # 9783846510124
Quantity: 1 available
Stock Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization
Published by
Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Softcover
Seller: Majestic Books, Hounslow, United Kingdom
Seller rating 5 out of 5 stars
Condition: New. Print on Demand pp. 104 2:B&W 6 x 9 in or 229 x 152 mm Perfect Bound on Creme w/Gloss Lam. Seller Inventory # 95160866
Quantity: 4 available
Stock Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization
Published by
Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Softcover
Seller: Books Puddle, New York, NY, U.S.A.
Seller rating 4 out of 5 stars
Condition: New. pp. 104. Seller Inventory # 2698285053
Quantity: 4 available
Stock Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization
Published by
Editorial Academica Espanola, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Softcover
Seller: Biblios, Frankfurt am main, HESSE, Germany
Seller rating 5 out of 5 stars
Condition: New. PRINT ON DEMAND pp. 104. Seller Inventory # 1898285047
Quantity: 4 available
Seller Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization
Published by
LAP LAMBERT Academic Publishing Okt 2011, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
New
Taschenbuch
Seller: buchversandmimpf2000, Emtmannsberg, BAYE, Germany
Seller rating 5 out of 5 stars
Taschenbuch. Condition: Neu. Neuware -Angular-resolved optical scatterometry is a new promising technology for metrology in lithography for the construction of VLSI chips such as DRAMs and CPUs. In order to measure the geometry dimensions and material properties of markers and interconnect lines, one needs to solve Maxwell's equations for an electromagnetic scattering problem. The well known RCWA discretization method is too slow for 3D applications whence one takes resort to either a finite element discretization method or a volume integral method (VIM). VIM systems of equations can be solved faster than FEM systems of equations. This book focuses on an iterative solution of linear systems emanating from VIM. Each different linear system depends in a non-linear manner on several geometry, material and incoming light-wave parameters. For a typical 2D-periodic application on resist, VIM is a factor of 20 faster than RCWA. The VIM discretization leads to a dense complex linear system for the electric field for a 2D-periodic grating (3D Maxwell's equations). The coefficient matrix A is almost full but matrix-vector multiplications can be performed. Therefore; systems should be solved with an iterative solution method.Books on Demand GmbH, Überseering 33, 22297 Hamburg 104 pp. Englisch. Seller Inventory # 9783846510124
Quantity: 2 available
Stock Image
Preconditioning Dense Complex Linear Systems from a VIM Discretization: Discretizing Maxwell*s equations using the volume integral method (VIM)
Published by
LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3846510122
ISBN 13: 9783846510124
Used
Paperback
Seller: Mispah books, Redhill, SURRE, United Kingdom
Seller rating 4 out of 5 stars
Paperback. Condition: Like New. Like New. book. Seller Inventory # ERICA75838465101226
Quantity: 1 available