INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS: Microelectronic device applications - Softcover
Synopsis
High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications.
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About the Authors
I, Dr. S.V. Jagadeesh Chandra published 18 scientific papers on challenges in the improvement of interface quality at high-k/semiconductor stack for microelectronic device applications. I got my doctorate under the guidance of Prof.Uthanna and Prof.Mohan Rao. Now I am working with Prof.C.J.Choi, SPRC, Chonbuk NationalUniversity, Korea.
I, Dr. S.V. Jagadeesh Chandra published 18 scientific papers on challenges in the improvement of interface quality at high-k/semiconductor stack for microelectronic device applications. I got my doctorate under the guidance of Prof.Uthanna and Prof.Mohan Rao. Now I am working with Prof.C.J.Choi, SPRC, Chonbuk NationalUniversity, Korea.
I, Dr. S.V. Jagadeesh Chandra published 18 scientific papers on challenges in the improvement of interface quality at high-k/semiconductor stack for microelectronic device applications. I got my doctorate under the guidance of Prof.Uthanna and Prof.Mohan Rao. Now I am working with Prof.C.J.Choi, SPRC, Chonbuk NationalUniversity, Korea.
"About this title" may belong to another edition of this title.
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS
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LAP LAMBERT Academic Publishing Jan 2011, 2011
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Taschenbuch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications. 188 pp. Englisch. Seller Inventory # 9783843394222
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS
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Investigations on Magnetron Sputtered Tantalum Oxide Films
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Investigations on Magnetron Sputtered Tantalum Oxide Films
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Investigations on Magnetron Sputtered Tantalum Oxide Films
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS | Microelectronic device applications
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Taschenbuch. Condition: Neu. INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS | Microelectronic device applications | S. V. Jagadeesh Chandra (u. a.) | Taschenbuch | 188 S. | Englisch | 2011 | LAP LAMBERT Academic Publishing | EAN 9783843394222 | Verantwortliche Person für die EU: BoD - Books on Demand, In de Tarpen 42, 22848 Norderstedt, info[at]bod[dot]de | Anbieter: preigu. Seller Inventory # 107133592
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS
Published by
LAP LAMBERT Academic Publishing Jan 2011, 2011
ISBN 10: 3843394229
ISBN 13: 9783843394222
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Taschenbuch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications.VDM Verlag, Dudweiler Landstraße 99, 66123 Saarbrücken 188 pp. Englisch. Seller Inventory # 9783843394222
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS : Microelectronic device applications
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LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3843394229
ISBN 13: 9783843394222
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INVESTIGATIONS ON MAGNETRON SPUTTERED TANTALUM OXIDE FILMS: Microelectronic device applications
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LAP LAMBERT Academic Publishing, 2011
ISBN 10: 3843394229
ISBN 13: 9783843394222
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