Three-dimensional Simulation of Semiconductor Devices: 1 (Progress in Numerical Simulation for Microelectronics) - Hardcover

Kircher, Roland; Bergner, Wolfgang

Hardcover

ISBN 10: 3764326441 ISBN 13: 9783764326449

Publisher: Birkhauser Verlag AG, 1991

Synopsis

The three-dimensional device simulation has become a necessary tool for the design and investigation of complex device structures. The evolution of the three-dimensional simulation tools is directly linked to the scaling of the devices and the increasing complex ity of dynamic random access memory (DRAM) cells. Scaling of MOSFET devices led to a three-dimensional geometry with effects which cannot be handled by two-dimensional simulations anymore. With increasing integration density in DRAMs the third dimen sion had to be utilized to realize the storage capacitor. The result ing leakage problems have to be investigated and the cell design optimized by means of three-dimensional simulations. This book is intended for senior undergraduate students in applied physics, electrical engineering and computational physics, as well as for scientists and engineers involved in semiconductor device re search and development. It is also intended for software engineers and all those who are concerned with simulation. The book will give an overview on the problems and activities con cerning three-dimensional device simulation, without the claim of being a classical textbook. It starts from the classical semiconduc tor equations, discusses the physical models used in device simu lation, describes the discretization and some numerical methods for solving the differential equations. The application of the three dimensional simulation to VLSI device engineering is illustrated by a few specific examples."

Edition details

• Publisher: Birkhauser Verlag AG
• Publication date: 1991
• ISBN 10: 3764326441
• ISBN 13: 9783764326449
• Binding: Hardcover
• Language: German
• Number of pages: 132