Technology of Integrated Circuits - Softcover

Widmann, D.; Mader, H.; Friedrich, H.

Softcover

ISBN 10: 3662041618 ISBN 13: 9783662041611

Publisher: Springer, 2012

Synopsis

1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.

Edition details

• Publisher: Springer
• Publication date: 2012
• Language: English
• ISBN 10: 3662041618
• ISBN 13: 9783662041611
• Binding: Paperback