Items related to Technology of Integrated Circuits

9783662041611: Technology of Integrated Circuits
Softcover
ISBN 10: 3662041618 ISBN 13: 9783662041611
Publisher: Springer, 2012

This specific ISBN edition is currently not available.

Synopsis

1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.

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Publisher
Springer
Publication date
2012
Language
English
ISBN 10 
3662041618
ISBN 13 
9783662041611
Binding
Paperback