Introduction to Microsystem Design (RWTHedition) - Softcover

Schomburg, Werner Karl

Softcover

ISBN 10: 3642268528 ISBN 13: 9783642268526

Publisher: Springer, 2013

Synopsis

Introduction to Microsystem Design describes both the design of micro systems and the equations needed to estimate basic elements. The text can be referenced quickly via equation tables, which are found in an index at the end of the book.

About this title

About the Author

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

From the Back Cover

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.
For quick reference equations are presented in tables which are found in an index at the end of this book.

Edition details

• Publisher: Springer
• Publication date: 2013
• Language: English
• ISBN 10: 3642268528
• ISBN 13: 9783642268526
• Binding: Paperback
• Number of pages: 344