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Synopsis
Electromigration is a microscopic phenomenon involving electric field-induced diffusion, which is very relevant to damage in interconnections. A common method for monitoring interconnection degradation is through electrical resistance measurements, which requires direct electrical contact. It is desirable to develop non-contact methods to monitor electromigration damage formation. In this thesis, we propose a novel Optical Microscopy Imaging Method (OMIM), and we provide a theoretical description and experimental results. OMIM not only provides a new method for studying electromigration, but also provides a useful method for studying other micro-devices and materials in a non-contact mode.
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Electromigration : Studied With the Optical Microscopy Imaging Method
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Electromigration (Paperback or Softback)
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Electromigration
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Electromigration: Studied with the Optical Microscopy Imaging Method
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Electromigration: Studied with the Optical Microscopy Imaging Method
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Electromigration
Published by
VDM Verlag Dr. Mueller e.K. 2008-10-10, 2008
ISBN 10: 3639088131
ISBN 13: 9783639088137
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