Laser-Assisted Microtechnology: Edition en anglais: Vol 19 (Springer Series in Materials Science) - Hardcover
Synopsis
An introduction to the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter has been added on the laser-assisted wet chemical micro-etching. This is a new method for direct 3-D micro-structuring of solids, with a number of potential applications.
"synopsis" may belong to another edition of this title.
Synopsis
An introduction to the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter has been added on the laser-assisted wet chemical micro-etching. This is a new method for direct 3-D micro-structuring of solids, with a number of potential applications.
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Laser-Assisted Microtechnology.
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Springer-Verlag GmbH & Co. KG, 1998
ISBN 10: 354063973X
ISBN 13: 9783540639732
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