Laser-Assisted Microtechnology: v. 19 (Springer Series in Materials Science) - Hardcover

Metev, Simeon M.; Veiko, Vadim P.

Hardcover

ISBN 10: 3540539255 ISBN 13: 9783540539254

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 1994

Synopsis

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

Edition details

• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
• Publication date: 1994
• Language: English
• ISBN 10: 3540539255
• ISBN 13: 9783540539254
• Binding: Hardcover
• Number of pages: 250