Gettering Defects in Semiconductors: 19 (Springer Series in Advanced Microelectronics, 19) - Hardcover

Perevostchikov, Victor A.; Skoupov, Vladimir D.

Hardcover

ISBN 10: 354026244X ISBN 13: 9783540262442

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 2005

Synopsis

Systematizes the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics. This book describes contemporary trends in gettering technologies from an international perspective. It also discusses the types and properties of structural defects in semiconductors.

About this title

From the Back Cover

Gettering Defects in Semiconductors fulfills three basic purposes:

- to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics;

- to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists;

- to fill a gap in the contemporary literature on the underlying semiconductor-material theory.

The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid-state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading.

Edition details

• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
• Publication date: 2005
• Language: English
• ISBN 10: 354026244X
• ISBN 13: 9783540262442
• Binding: Hardcover
• Number of pages: 404