Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems - Hardcover

Hardcover

ISBN 10: 352730746X ISBN 13: 9783527307463

Publisher: Wiley-VCH, 2004

Synopsis

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

About this title

Review

"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies."
Advanced Materials

"... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..."
MRS Bulletin

From the Back Cover

Advanced Micro & Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds, which together have an immense innovative application potential that opens up with control of shape and function from the atomic level right up to the visible world without any technological gaps.

In this volume, a close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefits of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Edition details

• Publisher: Wiley-VCH
• Publication date: 2004
• ISBN 10: 352730746X
• ISBN 13: 9783527307463
• Binding: Hardcover
• Language: English
• Edition number: 1
• Number of pages: 439
• Editor: Baltes Henry, Brand Oliver, Fedder Gary K., Hierold Christofer, Korvink Jan G., Tabata Osamu