Polymers for Microelectronics – Science and Technology: International Symposium Proceedings - Hardcover

Hardcover

ISBN 10: 3527281681 ISBN 13: 9783527281688

Publisher: Wiley VCH, 1990

Synopsis

In this book, an international team of authors from both industrial and academic research consider recent progress in polymers for microelectronics. They offer detailed coverage of

∗ fundamental and applied research on resists and related compounds ∗ polyimides and other functional polymers for microelectronics ∗ new photoresponsive polymers for optical memory and related applications.

Chemists and physicists active in this field will find here an exhaustive state–of–the–art report on one of the key elements of advanced technologies.

About this title

Synopsis

Polymers have played an important role in the development of microelectronics and are becoming ever more important for the future of microelectronics. The most important recent progress in the polymers for microelectronics, especially with regard to resist materials, was presented and discussed at "Polymers for Microelectronics (PME '89) - Science and Technology" - the first international symposium in this field to be held in Japan. About 300 researchers (70 from abroad and 230 Japanese) from all over the world attended PME '89. This volume has been organized into three sections: fundamental and applied research on resists and related compounds, polyimides and related functional polymers for electronics, and new photoresponsive polymers for optical memory and related applications. All papers were reviewed by referees.

Edition details

• Publisher: Wiley VCH
• Publication date: 1990
• Language: English
• ISBN 10: 3527281681
• ISBN 13: 9783527281688
• Binding: Hardcover
• Number of pages: 895
• Editor: Tabata Yoneho, Mita Itaru, Nonogaki Saburo, Horie Kazuyuki, Tagawa Seiichi