Materials Science and Technology: A Comprehensive Treatment Processing of Semiconductors: v. 16 - Softcover

 
9783527268290: Materials Science and Technology: A Comprehensive Treatment Processing of Semiconductors: v. 16
Softcover
ISBN 10: 3527268294 ISBN 13: 9783527268290
Publisher: Wiley VCH, 1996

Synopsis

This self–contained handbook deals with the enabling materials technology for the electronics industry. World renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies.

Contents: Wilkes: Silicon Processing. Mullin: Compound Semiconductor Processing, Kuech/BleLagally/Tischler: Epitaxial Growth. Leuschner/Pawlowski: Photolithography. Griffin: Doping. Turner/Donohoe: Etching Processes in Semiconductor Manufacturing. Chang/Sze: Silicon Device Structures. Lam/Stanchina: Compound Semiconductor Device Structures. Kwong: Silicon Device Processing. Parsey, Jr: Compound Semiconductor Device Processing. Amey: Chip Carriers. Knausenberger/Turlik: Interconnection Systems.

"synopsis" may belong to another edition of this title.

Synopsis

This volume is part of a series devoted to the growing interdisciplinary field of materials science and technology. A compendium of current state-of-the-art information, the series covers the most important classes of materials: metals; ceramics; glasses; polymers; semiconductors; and composites. Each volume deals with properties, processing, applications or general phenomena associated with these materials. This volume deals with the processing of semiconductors.

"About this title" may belong to another edition of this title.

Publisher
Wiley VCH
Publication date
1996
Language
English
ISBN 10 
3527268294
ISBN 13 
9783527268290
Binding
Paperback
Number of pages
704
Editor
Jackson Kenneth A.