Design for Manufacturability with Advanced Lithography - Softcover

Yu, Bei; Pan, David Z.

 
9783319203867: Design for Manufacturability with Advanced Lithography
Softcover
ISBN 10: 331920386X ISBN 13: 9783319203867
Publisher: Springer, 2015

This specific ISBN edition is currently not available.

Synopsis

Introduction.- Layout Decomposition for Triple Patterning.- Layout Decomposition for Other Patterning Techniques.- Standard Cell Compliance and Placement Co-Optimization.- Design for Manufacturability with E-Beam Lithography.- Conclusions and Future Works.-

"synopsis" may belong to another edition of this title.

Publisher
Springer
Publication date
2015
Language
English
ISBN 10 
331920386X
ISBN 13 
9783319203867
Binding
Paperback

Other Popular Editions of the Same Title

9783319203843: Design for Manufacturability with Advanced Lithography

Featured Edition

ISBN 10:  3319203843 ISBN 13:  9783319203843
Publisher: Springer, 2015
Hardcover