Microtransducer CAD: Physical and Computational Aspects (Computational Microelectronics) - Hardcover

Baltes, Henry; Nathan, Adam

Hardcover

ISBN 10: 3211831037 ISBN 13: 9783211831038

Publisher: Springer Verlag GmbH, 1999

Synopsis

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic" effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Edition details

• Publisher: Springer Verlag GmbH
• Publication date: 1999
• Language: English
• ISBN 10: 3211831037
• ISBN 13: 9783211831038
• Binding: Hardcover
• Number of pages: 445