Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon (Computational Microelectronics) - Hardcover

Book 13 of 17: Computational Microelectronics

Pichler, Peter

 
9783211206874: Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon (Computational Microelectronics)
Hardcover
ISBN 10: 3211206876 ISBN 13: 9783211206874
Publisher: Springer, 2004

Synopsis

Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in silicon, as well as of their complexes. Special emphasis is placed on compiling the structures, energetic properties, identified electrical levels and spectroscopic signatures, and the diffusion behavior from experimental and theoretical investigations. In addition, the book discusses the fundamental concepts of silicon and its defects, the electron system, diffusion, thermodynamics, and reaction kinetics which form the scientific basis needed for a thorough understanding of the text. Therefore, the book is able to provide an introduction to newcomers in this field up to a comprehensive reference for experts in process technology, solid-state physics, and simulation of semiconductor processes.

"synopsis" may belong to another edition of this title.

Publisher
Springer
Publication date
2004
Language
English
ISBN 10 
3211206876
ISBN 13 
9783211206874
Binding
Hardcover
Number of pages
575

Other Popular Editions of the Same Title

9783709172049: Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon (Computational Microelectronics)

Featured Edition

ISBN 10:  3709172047 ISBN 13:  9783709172049
Publisher: Springer, 2012
Softcover