Microsensor is a very small sensor with physical dimensions in the submicrometer to millimeter range. A sensor is a device that converts a nonelectrical physical or chemical quantity, such as pressure, acceleration, temperature, or gas concentration, into an electrical signal. Sensors are an essential element in many measurement, process, and control systems, with countless applications in the automotive, aerospace, biomedical, telecommunications, environmental, agricultural, and other industries. The objective of the book is to provide topics in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors.
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