Introduction to Metrology Applications in IC Manufacturing (Tutorial Texts) - Softcover

Su, Bo; Solecky, Eric; Vaid, Alok

Softcover

ISBN 10: 1628418117 ISBN 13: 9781628418118

Publisher: SPIE Press, 2015

Synopsis

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis―specifically, precision, matching, and relative accuracy.

Edition details

• Publisher: SPIE Press
• Publication date: 2015
• Language: English
• ISBN 10: 1628418117
• ISBN 13: 9781628418118
• Binding: Paperback
• Number of pages: 184