Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics ― 2011: Volume 1335: Symposium Held April 25-29, 2011, ... California, U.s.a. (MRS Proceedings) - Hardcover

9781605113128: Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics ― 2011: Volume 1335: Symposium Held April 25-29, 2011, ... California, U.s.a. (MRS Proceedings)

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ISBN 10: 1605113123 ISBN 13: 9781605113128

Publisher: Materials Research Society, 2011

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This volume includes selected papers based on the presentations given at Symposium O, 'Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics', held at the April 25-29, 2011 MRS Spring Meeting in San Francisco, California. The symposium included topics relating to low-k dielectrics, integration, reliability, metallization, packaging and emerging technologies.

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Publisher: Materials Research Society
Publication date: 2011
Language: English
ISBN 10: 1605113123
ISBN 13: 9781605113128
Binding: Hardcover
Number of pages: 140
Editor: Baklanov Mikhail R., Dubois Geraud, Dussarrat Christian, Kokubo Terukazu, Ogawa Shinichi

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MATERIALS, PROCESSES, AND RELIABILITY FOR ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS �" 2011

MIKHAIL R. BAKLANOV, IMECGERAUD DUBOIS, IBM ALMADEN RESEARCH CENTERCHRISTIAN DUSSARRAT, AIR LIQUIDETERUKAZU KOKUBO, NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGYSHINICHI OGAWA, JSR TSUKUBA RESEARCH LABORATORIES DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">MARIANNA PANTOUVAKI, ANTHONY GRUNENWALD, SHOKO ONO, HEE-WOO RHEE, JOHN H. ZHANG, QUOC TOAN LE, SVEN ZIMMERMANN, VALERI AFANAS'EV, NAN LU, WIM BOGAERTS, SHAONING YAO, NEDA DALILI, JON GUDMUNDSSON, PATRIC

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MATERIALS, PROCESSES, AND RELIABILITY FOR ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS �" 2011

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ISBN 10: 1605113123 ISBN 13: 9781605113128

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