Amorphous and Heterogeneous Silicon Thin Films: Fundamentals to Devices – 1999: Volume 557 (MRS Proceedings) - Hardcover

Hardcover

ISBN 10: 1558994645 ISBN 13: 9781558994645

Publisher: Cambridge University Press, 1999

Synopsis

Applications requiring large-area semiconductor coverage rely increasingly on amorphous and heterogeneous silicon materials because they can be deposited at low cost on a variety of substrates. This volume, first published in 1999, covers the range from fundamental research to the device applications of these materials. A special session on medium-range order is featured, and confirms the belief that ordering correlates with the electronic quality of a-Si:H films. Important experimental observations on metastable effects in a-Si:H are also reported, as are devices and processing strategies. Topics include: growth and properties; high-rate deposition; recrystallization, amorphization and porous silicon; ordering and hydrogen; metastability; defects, band tails and transport; heterogeneous materials and devices; thin-film transistors and displays; solar cells; and detectors, imagers and other devices.

About this title

Book Description

Applications requiring large-area semiconductor coverage rely increasingly on amorphous and heterogeneous silicon materials because they can be deposited at low cost on a variety of substrates. This volume, first published in 1999, covers the range from fundamental research to the device applications of these materials.

Edition details

• Publisher: Cambridge University Press
• Publication date: 1999
• Language: English
• ISBN 10: 1558994645
• ISBN 13: 9781558994645
• Binding: Hardcover
• Number of pages: 914
• Editor: Branz Howard M., Collins Robert W., Okamoto Hiroaki, Guha Subhendu, Schropp Ruud