Thin Films ― Structure and Morphology: Volume 441 (MRS Proceedings) - Hardcover

Hardcover

ISBN 10: 1558993452 ISBN 13: 9781558993457

Publisher: Materials Research Society, 1997

Synopsis

An interdisciplinary group of materials scientists, physicists, chemists and engineers come together in this book to discuss recent advances in the structure and morphology of thin films. Both scientific and technological issues are addressed. Work on thin films for a host of applications including microelectronics, optics, tribology, biomedical technologies and microelectromechanical systems (MEMS) are featured. Topics include: kinetics of growth; grain growth; instabilities, segregation and ordering; silicides; metallization; stresses in thin films; deposition and growth simulations; energetic growth processes; diamond films and carbide and nitride films.

Edition details

• Publisher: Materials Research Society
• Publication date: 1997
• Language: English
• ISBN 10: 1558993452
• ISBN 13: 9781558993457
• Binding: Hardcover
• Number of pages: 793
• Editor: Cammarata Robert C., Chason Eric H., Einstein Theodore L., Williams Ellen D., Lla Daryush, Moss Steven C.