Modeling and Simulation of Thin-Film Processing: Volume 389 (MRS Proceedings) - Hardcover

Hardcover

ISBN 10: 1558992928 ISBN 13: 9781558992924

Publisher: Materials Research Society, 1995

Synopsis

A diverse set of materials science communities come together in this volume to review the extraordinary progress made in the development of computer simulation and modeling techniques for the prediction of film morphology, microstructure, composition, profile and structure. These techniques are rapidly moving out of the area of academic research and into technological and production design areas of thin-film-based industries. The book is loosely organized in ascending order of modeling-length scales - from atomic, up to the entire deposition reactor. Topics include: deposition and growth modeling; film morphology and topology; film microstructure; failure mechanisms; etching; process modeling and control and reactor-scale modeling.

Edition details

• Publisher: Materials Research Society
• Publication date: 1995
• Language: English
• ISBN 10: 1558992928
• ISBN 13: 9781558992924
• Binding: Hardcover
• Number of pages: 382
• Editor: Fluss Michael J., Kee Robert J., Srolovitz David J., Volkert Cynthia A.