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Plasma Processing for VLSI: VLSI Electronics Microstructure Science, Vol. 8 - Softcover

 
9781483204321: Plasma Processing for VLSI: VLSI Electronics Microstructure Science, Vol. 8
Softcover
ISBN 10: 1483204324 ISBN 13: 9781483204321
Publisher: Academic Press, 2014
Publisher
Academic Press
Publication date
2014
Language
English
ISBN 10 
1483204324
ISBN 13 
9781483204321
Binding
Paperback
Number of pages
544
Editor
Einspruch Norman G.

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9780122341083: Plasma Processing for VLSI (v. 8) (Very Large Scale Integration Electronics)

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ISBN 10:  0122341082 ISBN 13:  9780122341083
Publisher: Academic Press Inc, 1984
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Einspruch, Norman G. (Editor) / Brown, Dale M. (Series Editor)
Published by Academic Press, 2014
ISBN 10: 1483204324 ISBN 13: 9781483204321
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