BioNanoFluidic MEMS (MEMS Reference Shelf) - Softcover

Softcover

ISBN 10: 1441942793 ISBN 13: 9781441942791

Publisher: Springer, 2010

Synopsis

This hands-on guide details biosensor development fundamentals and will provide inspiration to those who would like to develop and implement novel biosensors for agriculture, biomedical, homeland security, as well as environmental and disease identification. It also offers hands-on instruction on how to design, fabricate, test and implement next generation biosensors. The volume provides information on BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies. In addition, it offers complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration. It also details hands-on steps for implementation of biosensor fabrication, including a discussion of clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition and others.

About this title

From the Back Cover

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:

• BioNanoFluidic MEMS connection between the interdisciplinary nature of
  BioNanoFluidics and MEMS
   
• BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

• Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others

• Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS

• BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  
• Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others

• Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
  

"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent andconsistent manner."

STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus

Edition details

• Publisher: Springer
• Publication date: 2010
• Language: English
• ISBN 10: 1441942793
• ISBN 13: 9781441942791
• Binding: Paperback
• Number of pages: 305
• Editor: Hesketh Peter J.