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Dynamics of Microelectromechanical Systems: 17 (Microsystems, 17) - Softcover

 
9781441942258: Dynamics of Microelectromechanical Systems: 17 (Microsystems, 17)

Synopsis

This much-needed textbook is an exploration of a key area of study in mechanics. It is suitable for senior undergraduate and graduate level students and offers a novel and systematic look into the dynamics of MEMS. A highly practical treatment of the subject, it includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the quasi-static sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

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This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission.

Features of this work include:

  • An in-depth treatment of problems that involve reliable modeling, analysis and design,
  • Analytical models with correct dependences on service dimensions,
  • Cantilever based systems for nanofabrication researchers and designers, and
  • Dynamics of complex spring and beam microsystems.

Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained.

Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists.

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9780387368009: Dynamics of Microelectromechanical Systems: 17 (Microsystems, 17)

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ISBN 10:  0387368000 ISBN 13:  9780387368009
Publisher: Springer, 2007
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