Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment: Proceedings of the NATO Advanced ... II: Mathematics, Physics and Chemistry, 185) - Hardcover

Hardcover

ISBN 10: 1402030118 ISBN 13: 9781402030116

Publisher: Springer-Verlag New York Inc., 2005

Synopsis

This proceedings volume archives the contributions of the speakers who attended the NATO Advanced Research Workshop on “Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment” held at the Sanatorium Puscha Ozerna, th th Kyiv, Ukraine, from 25 to 29 April 2004.

About this title

Synopsis

This book collects the papers presented during NATO Advanced Research Workshop "Science and technology of Semiconductor on Insulator (SOI) structures and devices operating in a harsh environment", held in Kiev 26-30 April 2004. The volume contains both reviews from invited speakers and selected papers presenting major innovations in SOI materials and devices. Particular attention is paid to the reliability of SOI structures operating under harsh conditions. In the first part, the book deals with SOI material technology, the evolution of SOI materials, achievements in the main standard technologies as Smart Cut, SIMOX, porous silicon, as well as methods to create more exotic structures are described. The second part of the book covers the reliability aspect of SOI devices operating in a harsh environment: high and low temperatures, high voltages, with a focus on radiation effects and characterization of these devices. The third part of the book overviews novel devices and sensors opportunities for such conditions and the book closes with papers discussing the perspectives of SOI scaling to nano devices.

Edition details

• Publisher: Springer-Verlag New York Inc.
• Publication date: 2005
• Language: English
• ISBN 10: 1402030118
• ISBN 13: 9781402030116
• Binding: Hardcover
• Number of pages: 360
• Editor: Flandre Denis, Nazarov Alexei N., Hemment Peter L.F.