Items related to Physics of Radiofrequency Capacitive Discharge

Physics of Radiofrequency Capacitive Discharge - Hardcover

Savinov, V. P.

 
9781138600805: Physics of Radiofrequency Capacitive Discharge
Hardcover
ISBN 10: 1138600806 ISBN 13: 9781138600805
Publisher: CRC Press, 2018

Synopsis

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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About the Author

V. P. Savinov

"About this title" may belong to another edition of this title.

Publisher
CRC Press
Publication date
2018
Language
English
ISBN 10 
1138600806
ISBN 13 
9781138600805
Binding
Hardcover
Edition number
1
Number of pages
342