Items related to Measurement Technology for Micro-Nanometer Devices
Synopsis
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
"synopsis" may belong to another edition of this title.
About the Author
WENDONG ZHANG, North University of China, China
XIUJIAN CHOU, North University of China, China
TIELIN SHI, Huazhong University of Science and Technology, China
ZONGMIN MA, North University of China, China
HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
JING CHEN, Peking University, China
LIGUO CHEN, Soochow University, China
DACHAO LI, Tianjin University, China
CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China
From the Back Cover
An important reference for experts and students engaged in micro-nano device (MND) measuring technology, this book collects the latest research from production and academia on MND test technology, especially in the basic theories and experimental methods of MND online testing, dynamic testing, and typical device testing. It explains the methodologies in a simple and concise way, introducing MND measuring technology systematically and comprehensively, with cutting-edge research findings and technical practicality.
- A fully comprehensive examination of state-of-the-art technologies for measurementon a small scale
- Highlights the advanced research work from industry and academia in MND test technology
- Written at both introductory and advanced levels, provides the fundamentals as well as advanced theories
- Focuses on the measurement techniques for characterizing MEMS/NEMS devices
A fully comprehensive examination of state-of-the-art technologies for MND measurement, this book is aimed at graduate students in the fields of instrument science technology, precision manufacture, and optic instrument manufacture. It is also a valuable reference for engineers and researchers in micro- and nano-fabrication, MEMS/NEMS devices, and advanced instrumentation.
From the Inside Flap
An important reference for experts and students engaged in micro-nano device (MND) measuring technology, this book collects the latest research from production and academia on MND test technology, especially in the basic theories and experimental methods of MND online testing, dynamic testing, and typical device testing. It explains the methodologies in a simple and concise way, introducing MND measuring technology systematically and comprehensively, with cutting-edge research findings and technical practicality.
- A fully comprehensive examination of state-of-the-art technologies for measurementon a small scale
- Highlights the advanced research work from industry and academia in MND test technology
- Written at both introductory and advanced levels, provides the fundamentals as well as advanced theories
- Focuses on the measurement techniques for characterizing MEMS/NEMS devices
A fully comprehensive examination of state-of-the-art technologies for MND measurement, this book is aimed at graduate students in the fields of instrument science technology, precision manufacture, and optic instrument manufacture. It is also a valuable reference for engineers and researchers in micro- and nano-fabrication, MEMS/NEMS devices, and advanced instrumentation.
"About this title" may belong to another edition of this title.
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