A Guide to Hands-on MEMS Design and Prototyping - Softcover

Kubby, Joel A. A.

Softcover

ISBN 10: 1107645794 ISBN 13: 9781107645790

Publisher: Cambridge University Press, 2011

Synopsis

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

About this title

About the Author

Joel Kubby is a Professor of Electrical Engineering in the Baskin School of Engineering at the University of California, Santa Cruz. Prior to this, he was an Area Manager with the Xerox Wilson Center for Research and Technology and a Member of Technical Staff at the Webster Research Center in Rochester, New York. He has led a six-company industrial research consortium under the National Institute of Standards and Technology's Advanced Technology Program (ATP) to develop a new process for optical MEMS, and he has over 80 patents.

Edition details

• Publisher: Cambridge University Press
• Publication date: 2011
• Language: English
• ISBN 10: 1107645794
• ISBN 13: 9781107645790
• Binding: Paperback
• Number of pages: 196